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Proceedings Paper

Nonlinear-optical monitoring system of materials local crystalline characteristics
Author(s): P. E. Berezhnaja; Mikhail F. Stupak
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Paper Abstract

The second harmonic generation effect (SHG) has been used for an express, local, non-destructive control of the quantitative and qualitative crystalline characteristics of materials. The characteristics and possibilities of an automated laser monitoring system of crystalline parameters of semiconductor materials are presented. The system allows to determine orientation of crystallographic axes within several minutes. The error of measurements is about 0.1° in local surface area (with a diameter ? 100 microns, depth 0,1 ÷ 1,0 microns). It is possible to detect the presence of local strains (stresses), to create cards of crystal quality of a sample surface and optical quality of the volume of tested materials (obtaining time is about 15 mm.) with the help of this system.

Paper Details

Date Published: 29 July 2002
PDF: 6 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484486
Show Author Affiliations
P. E. Berezhnaja, Technological Design Institute of Scientific Instrument Engineering (Russia)
Mikhail F. Stupak, Technological Design Institute of Scientific Instrument Engineering (Russia)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Yuri V. Chugui; Sergei N. Bagayev; Albert Weckenmann; P. Herbert Osanna, Editor(s)

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