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Proceedings Paper

High-energy capacitive step micromotors
Author(s): Edvard G. Kostsov
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Paper Abstract

The operation principle and peculiarities of step micromotors based on the effect of electrostatic rolling of thin metallic films on the ferroelectric surface are studied. The characteristics of the reversible step micromotor designed on the basis of the described effect, using barium strontium niobate Ba0.5Sr0.5Nb2O6 with 2-4 ?m thickness and dielectric permeability value equal to 2000 — 4000 are given. The voltage pulse duration is equal to ? - 50 — 500 ?s, clock frequency equal to 1 — 10 kHz. The moving element step can range from 100Å to 10 ?m, depending on V and ?.

Paper Details

Date Published: 29 July 2002
PDF: 5 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484485
Show Author Affiliations
Edvard G. Kostsov, Institute of Automation and Electrometry (Russia)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Yuri V. Chugui; Sergei N. Bagayev; Albert Weckenmann; P. Herbert Osanna, Editor(s)

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