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Proceedings Paper

Application of diffractive optical elements in laser metrology
Author(s): Alexander G. Poleshchuk; Voldemar Petrovich Koronkevich; Victor Pavlovich Korolkov; Andrey G. Sedukhin
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Paper Abstract

Laser metrology often requires the precision forming of a probe laser beam with necessary wavefront shape or given intensity distribution. This problem is solved optimally by application of diffractive optical elements (DOE). In the IA&E SB RAS a circular laser writing system (CLWS) was created for high precision DOE fabrication. This system allows to fabricate arbitrary DOEs with minimum feature sizes below 0.6 ?m and the radial position accuracy of about 0.1 ?m over 300 mm substrates. The investigations carried out have confirmed promising prospects of application of high precision DOEs fabricated with the help of CLWS for solving various metrological problems.

Paper Details

Date Published: 29 July 2002
PDF: 12 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484470
Show Author Affiliations
Alexander G. Poleshchuk, Institute of Automation and Electrometry (Russia)
Voldemar Petrovich Koronkevich, Institute of Automation and Electrometry (Russia)
Victor Pavlovich Korolkov, Institute of Automation and Electrometry (Russia)
Andrey G. Sedukhin, Institute of Automation and Electrometry (Russia)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Yuri V. Chugui; Sergei N. Bagayev; Albert Weckenmann; P. Herbert Osanna, Editor(s)

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