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Proceedings Paper

New challenges and approaches to interferometric MEMS and MOEMS testing
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Paper Abstract

The paper gives the overview of various concepts of optical measurements of microelements including MEMS, MOEMS and electronic packages. In particular it describes waveguide microinterferometer which enables an alternative usage of conventional interferometry (CI), grating interferometry (GI) and digital holographic interferometry for shape in-plane and out-of-plane displacement measurements of static and dynamic microobjects. Additionally interferometric thermography (IT) is presented for determination of 3D refractive index distribution in fibre optics and waveguide microelements. To prove the applicability of these experimental tools, the wide selection of measurement examples is given.

Paper Details

Date Published: 29 July 2002
PDF: 15 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484467
Show Author Affiliations
Malgorzata Kujawinska, Warsaw Univ. of Technology (Poland)
Christophe Gorecki, Univ. de Franche-Comte (France)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Yuri V. Chugui; Sergei N. Bagayev; Albert Weckenmann; P. Herbert Osanna, Editor(s)

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