Share Email Print
cover

Proceedings Paper

Determination of the absolute contours of optical flats using Zernike phase contrast method
Author(s): Alexander A. Malyutin
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A procedure is described that employs Zemike phase contrast method for the measurements of small departures of the optical surfaces from flatness. Numerical modeling is carried out to demonstrate the ability of the method to achieve a ?/1000 measurement sensitivity using an optical system exhibiting a much lower optical quality.

Paper Details

Date Published: 29 July 2002
PDF: 8 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484463
Show Author Affiliations
Alexander A. Malyutin, General Physics Institute (Russia)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Yuri V. Chugui; Sergei N. Bagayev; Albert Weckenmann; P. Herbert Osanna, Editor(s)

© SPIE. Terms of Use
Back to Top