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Proceedings Paper

Use of a microprobe held by a laser beam for the study of surface reliefs
Author(s): Petr Jakl; Jan Jezek; Mojmir Sery; Alexandr Jonas; Pavel Zemanek
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Paper Abstract

We present a method which uses two-photon fluorescence excited in an optically confined fluorescent-labelled probe by the trapping beam for the study of topology of transparent surfaces. We demonstrate that for probe diameter of 200 nm, the vertical resolution of the method is better than 25nm.

Paper Details

Date Published: 29 July 2002
PDF: 7 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484462
Show Author Affiliations
Petr Jakl, Institute of Scientific Instruments (Czech Republic)
Jan Jezek, Institute of Scientific Instruments (Czech Republic)
Mojmir Sery, Institute of Scientific Instruments (Czech Republic)
Alexandr Jonas, Institute of Scientific Instruments (Czech Republic)
Pavel Zemanek, Institute of Scientific Instruments (Czech Republic)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Yuri V. Chugui; Sergei N. Bagayev; Albert Weckenmann; P. Herbert Osanna, Editor(s)

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