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Proceedings Paper

New profile recovery algorithm with high lateral resolution using spline smoothing
Author(s): Xiaojun Liu; Yongsheng Gao
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Paper Abstract

A new method to improve the lateral resolution of differential profile measurement is proposed, together with a related profile recovery algorithm. In this method, the lateral resolution will not be constrained to the distance between two differential probes. It can be a fraction of the distance and is affected by the scanning resolution. In the corresponding algorithm to recover a profile, d is the probes distance, dr 5 the scanning resolution, and dr = d/N,where N is the number of groups separated from the difference data set. Integration is applied to every group to build a profile. Finally, spline smoothing regression is used to the profiles to find translations between them to obtain the whole profile. Computer stimulation was used to examine the effectiveness of the proposed recovery algorithm and good accuracy was achieved.

Paper Details

Date Published: 29 July 2002
PDF: 5 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484459
Show Author Affiliations
Xiaojun Liu, Hong Kong Univ. of Science and Technology (Hong Kong)
Yongsheng Gao, Hong Kong Univ. of Science and Technology (Hong Kong)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life

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