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Proceedings Paper

Laser ellipsometry: precise method of surface measurement
Author(s): S. V. Rykhlitski; E. V. Spesivtsev; V. A. Shvets
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Paper Abstract

Systematization of major fields of laser ellipsometry application is given and basic ways of its development are considered. A series of industrially oriented laser ellipsometers have been developed. These are a scanning high-spatial resolution microellipsometer and a high-time resolution in-situ ellipsometer. The partial accuracy chart of the laser ellipsometers and the issues of their metrological certification are described. The possibilities of laser ellipsometry are illustrated by experimental measurements performed on equipment designed.

Paper Details

Date Published: 29 July 2002
PDF: 8 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484455
Show Author Affiliations
S. V. Rykhlitski, Institute of Semiconductor Physics (Russia)
E. V. Spesivtsev, Institute of Semiconductor Physics (Russia)
V. A. Shvets, Institute of Semiconductor Physics (Russia)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Yuri V. Chugui; Sergei N. Bagayev; Albert Weckenmann; P. Herbert Osanna, Editor(s)

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