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Proceedings Paper

MEMS-fabricated ICPF microactuators for biological manipulation
Author(s): Wenli Zhou; Wen Jung Li; John D. Mai
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Paper Abstract

Ionic Conducting Polymer Film (ICPF) micro grippers with multi-finger configurations were developed using spin-on Nafion and photolithographic technology. A commercial solution from Dupont Co. (Nafion SE-5012) was used to prepare ~0.2 μm thick ionic conducting polymer film. Micro cantilever structures were fabricated which composed of Au/Nafion/Au film layers. Grippers with 2-finger and 4-finger configurations were successfully developed. We have proved that the 2-fingered grippers can be actuated in water at ~5V DC voltages. The smallest 4-fingered grippers fabricated were 30 μm wide, 300 μm long and 0.4 μm thick for each finger. In addition, another interesting actuation behavior of the micro actuator was observed during fabrication. The actuators would curl up whenever they came in contact with water during the sacrificial release process. The curling process reversed instantaneously when the actuators are immersed in acid. We suggest that this phenomenon is probably due to the different volume expansions of Nafion in different medium. Besides, the current-voltage property was measured. We are further studying the consistency of their behaviors to modify the design and fabrication process for potential use in biological manipulations.

Paper Details

Date Published: 28 July 2003
PDF: 6 pages
Proc. SPIE 5051, Smart Structures and Materials 2003: Electroactive Polymer Actuators and Devices (EAPAD), (28 July 2003); doi: 10.1117/12.484387
Show Author Affiliations
Wenli Zhou, Chinese Univ. of Hong Kong (China)
Wen Jung Li, Chinese Univ. of Hong Kong (China)
Shenyang Institute of Automation (China)
John D. Mai, Microwave Bonding Instruments Inc. (United States)


Published in SPIE Proceedings Vol. 5051:
Smart Structures and Materials 2003: Electroactive Polymer Actuators and Devices (EAPAD)
Yoseph Bar-Cohen, Editor(s)

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