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Proceedings Paper

Stress development in Ni/C-multi-layers on Si-substrates with increasing period number
Author(s): Juergen Schreiber; Reiner Dietsch; Thomas Holz; Valeri Melov; Tilo Baumbach
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Proc. SPIE 5045, Testing, Reliability, and Application of Micro- and Nano-Material Systems, ; doi: 10.1117/12.484286
Show Author Affiliations
Juergen Schreiber, Fraunhofer-Institute for Nondestructive Testing (Germany)
Reiner Dietsch, Fraunhofer-Institut fuer Werkstoff- und Strahltech (Germany)
Thomas Holz, AXO Dresden GmbH (Germany)
Valeri Melov, Fraunhofer-Institute for Nondestructive Testing (Germany)
Tilo Baumbach, Fraunhofer-Institute for Nondestructive Testing (Germany)


Published in SPIE Proceedings Vol. 5045:
Testing, Reliability, and Application of Micro- and Nano-Material Systems
Norbert Meyendorf; George Y. Baaklini; Bernd Michel, Editor(s)

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