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Proceedings Paper

Strain and morphology in nano-patterned semiconductors
Author(s): Tilo Baumbach
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Proc. SPIE 5045, Testing, Reliability, and Application of Micro- and Nano-Material Systems, ; doi: 10.1117/12.484285
Show Author Affiliations
Tilo Baumbach, Fraunhofer-Institute for Nondestructive Testing (Germany)


Published in SPIE Proceedings Vol. 5045:
Testing, Reliability, and Application of Micro- and Nano-Material Systems
Norbert Meyendorf; George Y. Baaklini; Bernd Michel, Editor(s)

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