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Proceedings Paper

Nanoscale nondestructive evaluation of materials and devices by ultrasonic atomic force microscopy
Author(s): Kazushi Yamanaka; Toshihiro Tsuji; Hiroshi Irihama; Tsuyoshi Mihara
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Paper Abstract

Two evaluation methods of nano-scale internal defects by ultrasonic atomic force microscopy (UAFM) is reviewed. The first one is a linear vibration analysis of the contact stiffness calculated from a finite element method analysis of a model including a subsurface gap. The second one is a nonlinear vibration analysis of a stiffening or softening spring representing the opening-and-closing behavior of the gap. These methods were verified by the resonance frequency mapping, the load dependence of the resonance frequency and the resonance spectra in UAFM on a subsurface gap in highly oriented pyrolytic graphite. It was proved that the proposed methods are useful for evaluating the crack closure/opening on the nano-scale.

Paper Details

Date Published: 22 July 2003
PDF: 8 pages
Proc. SPIE 5045, Testing, Reliability, and Application of Micro- and Nano-Material Systems, (22 July 2003); doi: 10.1117/12.483823
Show Author Affiliations
Kazushi Yamanaka, Tohoku Univ. (Japan)
Toshihiro Tsuji, Tohoku Univ. (Japan)
Hiroshi Irihama, Tohoku Univ. (Japan)
Tsuyoshi Mihara, Tohoku Univ. (Japan)

Published in SPIE Proceedings Vol. 5045:
Testing, Reliability, and Application of Micro- and Nano-Material Systems
Norbert Meyendorf; George Y. Baaklini; Bernd Michel, Editor(s)

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