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Proceedings Paper

Novel spin-bowl-compatible wet developable bottom antireflective coating for i-line applications
Author(s): Vandana N. Krishnamurthy; Charles J. Neef; Stephen R. Turner
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Paper Abstract

A novel spin-bowl-compatible bottom anti-reflective coating (BARC) for i-line applications is presented in this study. The BARCs were prepared from a titanate sol-gel material, which exhibits excellent spin-bowl compatibility with a wide variety of solvents. A variable angle spectroscopic ellipsometer measurement on the titanate BARC gives an n (real refractive index) value of 1.71 and a k (imaginary refractive index) value of 0.40. The titanate BARC shows good compatibility with resist solvents and excellent photolithography performance with resolution down to 0.35 μm. No metal contamination was observed with this BARC when gate oxide integrity (GOI) testing was performed on different size capacitors.

Paper Details

Date Published: 12 June 2003
PDF: 8 pages
Proc. SPIE 5039, Advances in Resist Technology and Processing XX, (12 June 2003); doi: 10.1117/12.483736
Show Author Affiliations
Vandana N. Krishnamurthy, Brewer Science, Inc. (United States)
Charles J. Neef, Brewer Science, Inc. (United States)
Stephen R. Turner, Brewer Science, Inc. (United States)

Published in SPIE Proceedings Vol. 5039:
Advances in Resist Technology and Processing XX
Theodore H. Fedynyshyn, Editor(s)

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