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Proceedings Paper

Microvalve for SMA-based CHAD
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Paper Abstract

This paper describes the development of a micro-machined passive check valve for an SMA-based compact hybrid actuator device (CHAD). The overall diameter of the valve is 12 mm and the thickness is 1 mm. The structure houses an array of 56 micro check valves. Each micro valve has a 250 μm diameter orifice covered by 10 mm thick nickel flap. Stoppers on each micro valves limit the displacement of the flaps during an opening. This design allows the Ni flaps to withstand high-pressure gradient created by the actuator while achieving high flow rate. A finite element analysis is used to characterize the static and dynamic behaviors of the valve flap for the prediction on flow rate. The prediction is found to be in good agreement with the experiment on static flow rate. The test results indicate that the flaps are able to withstand pressure difference of 0.28 MPa while achieving flow rate of 20 cc/sec. The valve also has low cracking pressure and reverse leakage.

Paper Details

Date Published: 22 July 2003
PDF: 7 pages
Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); doi: 10.1117/12.483593
Show Author Affiliations
Dong Gun Lee, Univ. of California, Los Angeles (United States)
Quanfang Chen, Univ. of Central Florida (United States)
Daniel D. Shin, Univ. of California, Los Angeles (United States)
Gregory Paul Carman, Univ. of California, Los Angeles (United States)


Published in SPIE Proceedings Vol. 5055:
Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan; Laszlo B. Kish, Editor(s)

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