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Proceedings Paper

Design and analysis of a piezoelectric cantilever beam resonator
Author(s): Muturi G. Muriuki; William W. Clark; Qing-Ming Chen; Qing-Ming Wang
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Paper Abstract

This paper presents the design and analysis of a cantilever beam resonator that is driven by a piezoelectric material. In this paper, we shall look at the effects of miniaturizing the resonator. The beam is a bimorph structure with a Lead Zirconate Titanate (PZT) layer and a stainless steel substrate layer. The PZT layer is electroded in segments to form a sensor and actuator pair for feedback to drive the resonator. Key issues are the effects of design choices on the gain required to cause self-oscillation. These choices are placement and sizing of the sensor and actuator. The study is based on an analytical model of the beam. Results show that the gain required for self-oscillation is highly dependent on the actuator and sensor size and location, the mode of vibration and the overall resonator size.

Paper Details

Date Published: 22 July 2003
PDF: 12 pages
Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); doi: 10.1117/12.483586
Show Author Affiliations
Muturi G. Muriuki, Univ. of Pittsburgh (United States)
William W. Clark, Univ. of Pittsburgh (United States)
Qing-Ming Chen, Univ. of Pittsburgh (United States)
Qing-Ming Wang, Univ. of Pittsburgh (United States)

Published in SPIE Proceedings Vol. 5055:
Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan; Laszlo B. Kish, Editor(s)

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