Share Email Print

Proceedings Paper

Readout of superresolution pits with Sb superresolution reflective films
Author(s): Hao Ruan; Jingsong Wei
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

By using Sb as the super-resolution reflective layer and the SiN as dielectric layer, the super-resolution pits with a diameter of 380 nm were read out by the readout optics system with a laser wavelength of 632.8 nm and a NA of 0.40. In addition, the influence of the Sb thin film thickness on the readout signal was investigated, the results showed that the optimum Sb thin film thickness is 28 to approximatley 30 nm, and the maximum CNR is 38 to approximately 40 dB.

Paper Details

Date Published: 17 September 2002
PDF: 5 pages
Proc. SPIE 4930, Advanced Optical Storage Technology, (17 September 2002); doi: 10.1117/12.483344
Show Author Affiliations
Hao Ruan, Shanghai Institute of Optics and Fine Mechanics and National Engineering Research Ctr. for (China)
Jingsong Wei, Shanghai Institute of Optics and Fine Mechanics (China)

Published in SPIE Proceedings Vol. 4930:
Advanced Optical Storage Technology
Duanyi Xu; Seiya Ogawa, Editor(s)

© SPIE. Terms of Use
Back to Top