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Proceedings Paper

Detection of optical field by near-field scanning optical microscopy
Author(s): Tiejun Xu; Jiying Xu; Jia Wang; Dong Pan; Liqun Sun; Qian Tian
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Paper Abstract

Based on theory and method of the near-field optics, optical resolution of near-field scanning optical microscopy (NSOM) is beyond the classical optical diffraction limit and down to tens of nanometer or even less. In this paper, a collection mode NSOM is built to detect and analyze local near-field distribution. The output optical field of a standard 1μm×1μm scale 2D grating has been detected. This NSOM system can also be used to study local near-field distribution of the focused spot of solid immerging lens (SIL) and the result can be directly used to evaluate SIL and compared with the calculation of its theoretical model and as a result, to improve the theoretical model.

Paper Details

Date Published: 17 September 2002
PDF: 4 pages
Proc. SPIE 4930, Advanced Optical Storage Technology, (17 September 2002); doi: 10.1117/12.483336
Show Author Affiliations
Tiejun Xu, Tsinghua Univ. (China)
Jiying Xu, Tsinghua Univ. (China)
Jia Wang, Tsinghua Univ. (China)
Dong Pan, Tsinghua Univ. (China)
Liqun Sun, Tsinghua Univ. (China)
Qian Tian, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 4930:
Advanced Optical Storage Technology
Duanyi Xu; Seiya Ogawa, Editor(s)

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