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Proceedings Paper

Nano-stepper-driven optical shutter for applications in free-space micro-optics
Author(s): Justyna Zawadzka; Lijie Li; Anartz Unamuno; Deepak G. Uttamchandani
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Paper Abstract

In this paper we report a simple design of a micro-optical shutter/attenuator. The standard MUMPS process was used to fabricate the device. A vertically erected, gold-coated, 200x300 ?m side length micro-mirror was precisely placed between the end faces of two closely spaced optical fibers. The position of the micro-mirror with respect to the optical fiber end face was controlled by a nano-stepping motor array. Optical and mechanical tests were performed on the device. A 1.55 ?m laser beam was sent along the optical fiber. When the micro-mirror was removed from the front of the fiber, the coupling efficiency between two fibers was –10 dBm. Once the micro-mirror was placed in the optical path the coupling efficiency dropped to –51.5 dBm. The best attenuation was obtained when the micro-mirror blocked the whole cross-section of the laser beam diameter. It is evident that the device can operate as a high precision fiber optic attenuator or shutter.

Paper Details

Date Published: 10 September 2002
PDF: 8 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483194
Show Author Affiliations
Justyna Zawadzka, Univ. of Strathclyde (United Kingdom)
Lijie Li, Univ. of Strathclyde (United Kingdom)
Anartz Unamuno, Univ. of Strathclyde (United Kingdom)
Deepak G. Uttamchandani, Univ. of Strathclyde (United Kingdom)


Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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