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Proceedings Paper

Nano-stepper-driven optical shutter for applications in free-space micro-optics
Author(s): Justyna Zawadzka; Lijie Li; Anartz Unamuno; Deepak G. Uttamchandani
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Paper Details

Date Published: 10 September 2002
PDF: 8 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483194
Show Author Affiliations
Justyna Zawadzka, Univ. of Strathclyde (United Kingdom)
Lijie Li, Univ. of Strathclyde (United Kingdom)
Anartz Unamuno, Univ. of Strathclyde (United Kingdom)
Deepak G. Uttamchandani, Univ. of Strathclyde (United Kingdom)


Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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