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Proceedings Paper

Structural design of novel low-actuation MEMS switches for X-band application
Author(s): Weibin Zheng; Qing-An Huang; Fu-Xiao Li
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Paper Details

Date Published: 10 September 2002
PDF: 6 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483188
Show Author Affiliations
Weibin Zheng, Southeast Univ. (China)
Qing-An Huang, Southeast Univ. (China)
Fu-Xiao Li, Nanjing Electronic Device Institute (China)

Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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