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Proceedings Paper

Design and simulation of a bulk micromachined relay with lateral contact
Author(s): Zhenchuan Yang; Zhihong Li; Yilong Hao; Guoying Wu
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Paper Details

Date Published: 10 September 2002
PDF: 4 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483185
Show Author Affiliations
Zhenchuan Yang, Peking Univ. (China)
Zhihong Li, Peking Univ. (China)
Yilong Hao, Peking Univ. (China)
Guoying Wu, Peking Univ. (China)

Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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