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Proceedings Paper

Equivalent circuit macromodel for a beam-structure electromechanical system in F-I analogy
Author(s): Hua Rong; Qing-An Huang; Weihua Li
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Paper Abstract

System-level simulation is an important phase for shortening design cycle and reducing design costs of MEMS devices, while the key to do this is to create macromodels for the MEMS devices. An equivalent circuit macromodel for beam-structure electromechanical systems is presented in force-current (F-I) analogy. It is appropriate for small-signal time and frequency domain analysis. Comparing with the existed macormodel created by force-voltage (F-V) analogy, the F-I analogy macromodel has the following advantage: the topology of the electric network of a F-I analogy macromodel is the same one as its original mechanical network. So it is very convenient to create an equivalent circuit macromedel for a complicated MEMS in F-I analogy. Simulating results show that the F-I analogy macromodel has high accuracy.

Paper Details

Date Published: 10 September 2002
PDF: 8 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483182
Show Author Affiliations
Hua Rong, Southeast Univ. (China)
Qing-An Huang, Southeast Univ. (China)
Weihua Li, Southeast Univ. (China)


Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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