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Proceedings Paper

Capacitive rf MEMS switch with composite beam
Author(s): Min Miao; Zhiyong Xiao; Guoying Wu; Yilong Hao; Haixia Zhang
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Paper Details

Date Published: 10 September 2002
PDF: 8 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483181
Show Author Affiliations
Min Miao, Peking Univ. (China)
Zhiyong Xiao, Peking Univ. (China)
Guoying Wu, Peking Univ. (China)
Yilong Hao, Peking Univ (China)
Haixia Zhang, Peking Univ. (China)

Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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