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Proceedings Paper

Silicon microchannel array based on MEMS process
Author(s): Qingduo Duanmu; Ye Li; Delong Jiang; Yanjun Gao; Lichen Fu; Jingquan Tian
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Paper Details

Date Published: 10 September 2002
PDF: 4 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483179
Show Author Affiliations
Qingduo Duanmu, Changchun Univ. of Science and Technology (China)
Ye Li, Changchun Univ. of Science and Technology (China)
Delong Jiang, Changchun Univ. of Science and Technology (China)
Yanjun Gao, Changchun Univ. of Science and Technology (China)
Lichen Fu, Changchun Univ. of Science and Technology (China)
Jingquan Tian, Changchun Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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