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Proceedings Paper

Optimization and simulation of the surface acoustic wave motor
Author(s): Xiquan Cui; Lan Wu; Hai-jun Zhang
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Paper Abstract

Using the numerical analysis method, the mechanism of the surface acoustic wave (SAW) motor is further discussed, the performances of the SAW motor under different slider and stator contact conditions are examined, and many factors that affect the efficiency of the SAW motor are introduced. In addition, the design of SAW motor with power circulation structure is illustrated. Experiments show that the efficiency of the SAW motor increases, and the threshold driving voltage of the SAW motor reduces.

Paper Details

Date Published: 10 September 2002
PDF: 9 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483178
Show Author Affiliations
Xiquan Cui, Zhejiang Univ. (China)
Lan Wu, Zhejiang Univ. (China)
Hai-jun Zhang, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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