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Proceedings Paper

Optimization and simulation of the surface acoustic wave motor
Author(s): Xiquan Cui; Lan Wu; Hai-jun Zhang
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Paper Details

Date Published: 10 September 2002
PDF: 9 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483178
Show Author Affiliations
Xiquan Cui, Zhejiang Univ. (China)
Lan Wu, Zhejiang Univ. (China)
Hai-jun Zhang, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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