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Proceedings Paper

Micromechanical variable optical attenuator based on EDM micromachining
Author(s): Zhonghui Cao; Ye Yuan; Junfeng Bao; Xiaodong Wu
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Paper Details

Date Published: 10 September 2002
PDF: 3 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483177
Show Author Affiliations
Zhonghui Cao, Zhejiang Univ. (China)
Ye Yuan, Zhejiang Univ. (China)
Junfeng Bao, Zhejiang Univ. (China)
Xiaodong Wu, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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