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Proceedings Paper

Pd/Ni bilayer electrochemical microactuator
Author(s): Jinyuan Yao; Guifu Ding; Ying Cao; Chunsheng Yang; Tianhui Shen
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Paper Abstract

The hydrogen actuating microactuator works in the caustic electrolyte, the chemical stability of the materials is very important for the lifetime of this kind of microactuators,. As compared with mischmetal (Mm) based LaNi5 series alloy films reported before, palladium layers is more suitable for this purpose, In this paper, a prototype of electrochemical microactuator with Pd/Ni bilayer based on the hydrogen induced actuation is presented, the performance and microfabrication process of this microactuator are described in detail.

Paper Details

Date Published: 10 September 2002
PDF: 5 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483172
Show Author Affiliations
Jinyuan Yao, Shanghai Jiaotong Univ. (China)
Guifu Ding, Shanghai Jiaotong Univ. (China)
Ying Cao, Shanghai Jiaotong Univ. (China)
Chunsheng Yang, Shanghai Jiaotong Univ. (China)
Tianhui Shen, Shanghai Jiaotong Univ. (China)


Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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