Share Email Print

Proceedings Paper

Pd/Ni bilayer electrochemical microactuator
Author(s): Jinyuan Yao; Guifu Ding; Ying Cao; Chunsheng Yang; Tianhui Shen
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Details

Date Published: 10 September 2002
PDF: 5 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483172
Show Author Affiliations
Jinyuan Yao, Shanghai Jiaotong Univ. (China)
Guifu Ding, Shanghai Jiaotong Univ. (China)
Ying Cao, Shanghai Jiaotong Univ. (China)
Chunsheng Yang, Shanghai Jiaotong Univ. (China)
Tianhui Shen, Shanghai Jiaotong Univ. (China)

Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

© SPIE. Terms of Use
Back to Top