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Proceedings Paper

Comparison of theoretical and experimental determination of the flexing of scratch drive actuator plates
Author(s): Lijie Li; James Gordon Brown; Deepak G. Uttamchandani
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Paper Details

Date Published: 10 September 2002
PDF: 10 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483170
Show Author Affiliations
Lijie Li, Univ. of Strathclyde (United Kingdom)
James Gordon Brown, Univ. of Strathclyde (United Kingdom)
Deepak G. Uttamchandani, Univ. of Strathclyde (United Kingdom)

Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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