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Proceedings Paper

Optical MEMS for high-end microspectrometers
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Paper Abstract

We discuss grating array spectral sensors as the most promising basic architecture for future high-end micro-spectro-meters. New extensions of this architecture with 2D-detector arrays are presented. They increase the spectral resolution by sub-pixel imaging. Sub-pixel architectures allow miniaturization of the spectrometers and shift the limits significantly towards the diffraction limit to the grating. To fully employ this, the slit dimensions have to be in the order of a few wavelengths, for instance down to 2 μm in the UV region, requiring micro-machined entrance apertures. Feasible entrance apertures are transmissive MEMS, such as static slit patterns, micro shutters or mechanical slit positioning systems.

Paper Details

Date Published: 10 September 2002
PDF: 9 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483168
Show Author Affiliations
Rainer Riesenberg, Institute for Physical High Technology (Germany)
Andreas Wuttig, Institute for Physical High Technology (Germany)
Guenter Nitzsche, Institute for Physical High Technology (Germany)
Bernd Harnisch, European Space Agency/ESTEC (Netherlands)


Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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