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Proceedings Paper

Design optimization and fabrication process of MEMS micro-magnetometer based on tunneling effect
Author(s): Zhaoying Zhou; Xing Yang; Junhua Zhu; Xiongying Ye
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Paper Details

Date Published: 10 September 2002
PDF: 8 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483166
Show Author Affiliations
Zhaoying Zhou, Tsinghua Univ. (China)
Xing Yang, Tsinghua Univ. (China)
Junhua Zhu, Tsinghua Univ. (China)
Xiongying Ye, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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