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Proceedings Paper

Designing, fabrication, and test of a MEMS colloid thruster
Author(s): Zhaoying Zhou; Jijun Xiong; Xiongying Ye; Xiaohao Wang; Yanyin Feng
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Paper Abstract

A MEMS based micro colloid thruster (including an source emitter array and an extractor) is designed, fabricated and tested. Source emitter array of the thruster is silicon column etched by ICP. The negative electrode on the extractor can be controlled separately. After bonding together, a single emitter and extractor works on an electrical colloid propulsion principle, and produce µN order thrust. Such a small and controllable thrust is the urgent requirement for a micro-satellite. Thrust test for the micro colloid thruster is made in high vacuum box. Thrust is acted on a cantilever beam, and the displacement of cantilever beam is detected by a current vortex sensor. Analysis to the recording data shows that the maxim thrust produced by a single emitter is about 2 µN, which is agreement with theory estimate.

Paper Details

Date Published: 10 September 2002
PDF: 7 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483164
Show Author Affiliations
Zhaoying Zhou, Tsinghua Univ. (China)
Jijun Xiong, Tsinghua Univ. (China)
Xiongying Ye, Tsinghua Univ. (China)
Xiaohao Wang, Tsinghua Univ. (China)
Yanyin Feng, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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