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Proceedings Paper

Design and simulation of integrated CMOS-compatible capacitive absolute pressure-sensing microsystems
Author(s): Minxin Zhou; Qing-An Huang; Ming Qin
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Paper Details

Date Published: 10 September 2002
PDF: 9 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483160
Show Author Affiliations
Minxin Zhou, Southeast Univ. (China)
Qing-An Huang, Southeast Univ. (China)
Ming Qin, Southeast Univ. (China)


Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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