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Proceedings Paper

Fabrication of reflective micromirror in micromechanical optical switches
Author(s): Wei Dong; Weiyou Chen; Han Yang; Long Zhang; Ping Ji; Wenbin Guo; Caixia Liu; Xindong Zhang; Dongming Sun; Cuiping Jia; Jianxuan Pan
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Paper Details

Date Published: 10 September 2002
PDF: 5 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483156
Show Author Affiliations
Wei Dong, Jilin Univ. (China)
Weiyou Chen, Jilin Univ. (China)
Han Yang, Jilin Univ. (China)
Long Zhang, Jilin Univ. (China)
Ping Ji, Jilin Univ. (China)
Wenbin Guo, Jilin Univ. (China)
Caixia Liu, Harbin Institute of Technology (China)
Xindong Zhang, Jilin Univ. (China)
Dongming Sun, Jilin Univ. (China)
Cuiping Jia, Jilin Univ. (China)
Jianxuan Pan, Jilin University (China)


Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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