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Proceedings Paper

Fabrication of reflective micromirror in micromechanical optical switches
Author(s): Wei Dong; Weiyou Chen; Han Yang; Long Zhang; Ping Ji; Wenbin Guo; Caixia Liu; Xindong Zhang; Dongming Sun; Cuiping Jia; Jianxuan Pan
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Paper Abstract

Using pure aqueous KOH solution and a one-level mask, the reflective micromirror in the direction <100> and the fibers self-aligned V-grooves in the direction <110> were fabricated on the (100) silicon. Reflective micromirror is a part of {100} family; the surface of the mirror is perpendicular at the optical axes. The deviation brought by manual assemble can be decreased by crystal orientation self-aligned between the micromirror and fibers. Using Atomic Force Microscope (AFM), the measured the surface roughness of the reflective micromirror is below 40nm, at a wavelength of 1550nm the reflectivity ofthe micromirror was measured to be higher than 80%.

Paper Details

Date Published: 10 September 2002
PDF: 5 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483156
Show Author Affiliations
Wei Dong, Jilin Univ. (China)
Weiyou Chen, Jilin Univ. (China)
Han Yang, Jilin Univ. (China)
Long Zhang, Jilin Univ. (China)
Ping Ji, Jilin Univ. (China)
Wenbin Guo, Jilin Univ. (China)
Caixia Liu, Harbin Institute of Technology (China)
Xindong Zhang, Jilin Univ. (China)
Dongming Sun, Jilin Univ. (China)
Cuiping Jia, Jilin Univ. (China)
Jianxuan Pan, Jilin University (China)


Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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