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Proceedings Paper

Excimer laser micromachining technology in biochip
Author(s): Tao Chen; Jiming Chen; Yu Zhang; Bohua Ying; Tao Jing; Tiechuan Zuo
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Paper Abstract

This paper briefly introduce our work on new biochip manufacuring utilizing excimer laser micromachining. The experiment results shows, that this technology have potentials in actual microstructure forming, processing way, manufacturing cost, efficiency, etc. We investigate the projection mask ablation on PMMA, and get the microgear sample. With the relative motion between the workpiece and the mask, the repeated excimer laser pulse will etch a 3D microstructures, or even form several different profiles on the straight line microgroove. This will be very useful for the microchannel formation on Biochip.

Paper Details

Date Published: 10 September 2002
PDF: 5 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483155
Show Author Affiliations
Tao Chen, Beijing Polytechnic Univ. (China)
Jiming Chen, Beijing Polytechnic Univ. (China)
Yu Zhang, Beijing Polytechnic Univ. (China)
Bohua Ying, Beijing Polytechnic Univ. (China)
Tao Jing, Beijing Polytechnic Univ. (China)
Tiechuan Zuo, Beijing Polytechnic Univ. (China)

Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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