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Proceedings Paper

Laser fabrication technology for micromachines
Author(s): Jiming Chen; Tao Chen; Xubao Wang; Tiechuan Zuo
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Paper Abstract

The laser micro-fabrication technology for micromachine is a noticeable research direction in micro-machine manufacture. In this paper several laser micro-fabrication technologies have been introduced. They are laser mask project lithograph, focus laser beam etching, selective laser sintering rapid fabrication and laser direct deposited fused powder. Authors also introduce the micro gears made with excimer laser mask exposure lithograph in PMMA and the micro Chinese character which is as small as a tip of match made with powder laser sintering technology. Furthermore authors propose another way to make micro-part which use fiber laser or disk laser combined with nano powder.

Paper Details

Date Published: 10 September 2002
PDF: 5 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483154
Show Author Affiliations
Jiming Chen, Beijing Polytechnic Univ. (China)
Tao Chen, Beijing Polytechnic Univ. (China)
Xubao Wang, Beijing Polytechnic Univ. (China)
Tiechuan Zuo, Beijing Polytechnic Univ. (China)

Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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