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Proceedings Paper

Laser fabrication technology for micromachines
Author(s): Jiming Chen; Tao Chen; Xubao Wang; Tiechuan Zuo
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Paper Details

Date Published: 10 September 2002
PDF: 5 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483154
Show Author Affiliations
Jiming Chen, Beijing Polytechnic Univ. (China)
Tao Chen, Beijing Polytechnic Univ. (China)
Xubao Wang, Beijing Polytechnic Univ. (China)
Tiechuan Zuo, Beijing Polytechnic Univ. (China)


Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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