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Proceedings Paper

Fabrication of 1.3-um Si-based MEMS tunable optical filter
Author(s): Yuhua Zuo; Changjun Huang; Buwen Cheng; Rongwei Mao; Liping Luo; Junhua Gao; Y. X. Bai; Liangchen Wang; Jinzhong Yu; Qiming Wang
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Paper Abstract

In this paper we report the fabrication of 1.3µm Si-based MEMS tunable optical filter, by surface micromaching. Through wet etching of polyimide sacrificial layer, a tunable Fabry-Perot filter was successfully fabricated. We make the capacitance measurement of the prototype device, compare the experimental curve with the theoretical one, and explain the difference between them.

Paper Details

Date Published: 10 September 2002
PDF: 4 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483151
Show Author Affiliations
Yuhua Zuo, Institute of Semiconductors (China)
Changjun Huang, Institute of Semiconductors (China)
Buwen Cheng, Institute of Semiconductors (China)
Rongwei Mao, Institute of Semiconductors (China)
Liping Luo, Institute of Semiconductors (China)
Junhua Gao, Institute of Semiconductors (China)
Y. X. Bai, Institute of Semiconductors (China)
Liangchen Wang, Institute of Semiconductors (China)
Jinzhong Yu, Institute of Semiconductors (China)
Qiming Wang, Institute of Semiconductors (China)


Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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