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Proceedings Paper

Microgripper for handling and assembly in MEMS produced by SU-8 technology
Author(s): Dragan Petrovic; Gordana Popovic; Tatjana Petrovic; Andreas Schneider; Ejaz Huq; Helmut Detter; Friedrich Franek
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Paper Abstract

Some of the most important steps in manufacturing microelectromechnical systems (MEMS) are their assembly and handling. With handling we mean the way we can safely, without damages, pick microparts of any shape or any kind of material, rotate them to the desired orientation and finally position them precisely on or connect them with other microparts. For these purposes, specially designed tools – microgrippers – are required. This paper presents the design, development, fabrication method using the SU8 technology and post-fabrication processes with the goal to obtain a new type of micro-gripper. This micro-gripper was produced for a handling and assembly station developed at the IMFT (TU Wien). To investigate the obtained structures we performed a "quality inspection" and a calibration of the gripper parameters. These investigations gave an important insight on such parameters as technology accuracy, parameter settings for the SU8 technology, the obtained properties of the structure and the functional features (elasticity and applied force). Based on this, possibilities for further quality improvements have been considered.

Paper Details

Date Published: 10 September 2002
PDF: 10 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483150
Show Author Affiliations
Dragan Petrovic, Vienna Univ. of Technology (Austria)
Gordana Popovic, Vienna Univ. of Technology (Austria)
Tatjana Petrovic, Rutherford Appleton Lab. (United Kingdom)
Andreas Schneider, Rutherford Appleton Lab. (United Kingdom)
Ejaz Huq, Rutherford Appleton Lab. (United Kingdom)
Helmut Detter, Vienna Univ. of Technology (Austria)
Friedrich Franek, Vienna Univ. of Technology (Austria)

Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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