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Proceedings Paper

Error-compensation technology to deal with axis misalignment of multi MEMS sensors
Author(s): Rong Zhu; Zhaoying Zhou
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Paper Abstract

As micro electro-mechanical system (MIEMS) technology matures as an industry, the integration of standard integrated circuit and multi-MEMS-sensors will continue to increase. When assembling multi-sensors into a micro electro-mechanical system, usually exists axis-misalignment problem, which will inevitably induce large measurement error. This paper proposes an error compensation scheme based on optical alignment for solving this problem. A functional explanation is followed by a brief description of the optical layout. The computation including investigation and compensation to the axis-misalignment is covered later. Finally tests are conducted with a micro electro-mechanical azimuth-level detector to prove the validity of the method.

Paper Details

Date Published: 10 September 2002
PDF: 5 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483149
Show Author Affiliations
Rong Zhu, Tsinghua Univ. (China)
Zhaoying Zhou, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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