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Proceedings Paper

Influence of substrates on photoluminescence for ZnO films prepared by r.f. sputtering
Author(s): Qingpu Wang; Deheng Zhang; Z. Y. Xue; Jin Ma
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Paper Abstract

ZnO films were deposited on sapphire, Si, quartz and Cornign 7059 glass substrates by r.f. sputtering. A 356 nm UV photoluminescence (PL) peak corresponding to inter-band transition was observed for the films deposited on sapphire, Si and quartz substrates when excited with 270 nm light. For the films prepared on Corning 7059 glass, only a 446 nm blue emission peak originated from electron transition from shallow donor level of oxygen vacancies to the valence band was found. After high temperature annealing in air, the intensity of PL peaks for the films onthe former three types substrates increased pronouncedly.

Paper Details

Date Published: 17 September 2002
PDF: 4 pages
Proc. SPIE 4918, Materials, Devices, and Systems for Display and Lighting, (17 September 2002); doi: 10.1117/12.483101
Show Author Affiliations
Qingpu Wang, Shandong Univ. (China)
Deheng Zhang, Shandong Univ. (China)
Z. Y. Xue, Shandong Univ. (China)
Jin Ma, Shandong Univ. (China)


Published in SPIE Proceedings Vol. 4918:
Materials, Devices, and Systems for Display and Lighting
Fuxi Gan; Ming Hsien Wu; Lionel C. Kimerling, Editor(s)

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