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Proceedings Paper

Structural properties of SnO2:Sb transparent conducting films deposited on flexible substrates
Author(s): Jin Ma; Hong-Lei Ma; Shi-Yong Zhang; Yingge Yang; Shu-Lai Huang; Xiao-Tao Hao
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Paper Abstract

Antimony doped tin oxide films have been deposited on flexible substrates such as polyimide and polypropylene adipate. And the structural properties of the films have been investigated. The XRD measurements reveal that all of the obtained films were polycrystalline with the rutile structure. With increasing the substrate temperature and film thickness, the crystallinity of the resulting films is improved and the crystalline size becomes larger. The substrate temperature and film thickness dependence of crystallinity for the SnO2:Sb films were further revealed by their atomic force micrographs, which is consistent with the XRD observations. The XPS details of the SnO2:Sb films are also given. The tin core levels Sn 3d5/2 are observed at 486.5 and 494.9 eV, respectively, while the O 1s peak is obtained at 530.6 eV. It can be seen that the oxygen peak in the spectra is asymmetric, which is due to the concealed Sb 3d peak. The gap between the Sn 3d5/2 and Sn 3d3/2 levels is approximately the same as in the standard spectrum of Sn.

Paper Details

Date Published: 17 September 2002
PDF: 5 pages
Proc. SPIE 4918, Materials, Devices, and Systems for Display and Lighting, (17 September 2002); doi: 10.1117/12.483085
Show Author Affiliations
Jin Ma, Shandong Univ. (China)
Hong-Lei Ma, Shandong Univ. (China)
Shi-Yong Zhang, Changan Univ. (China)
Yingge Yang, Shandong Univ. (China)
Shu-Lai Huang, Shandong Univ. (China)
Xiao-Tao Hao, Shandong Univ. (China)

Published in SPIE Proceedings Vol. 4918:
Materials, Devices, and Systems for Display and Lighting
Fuxi Gan; Ming Hsien Wu; Lionel C. Kimerling, Editor(s)

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