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Proceedings Paper

Study of impurities in CVD diamond using cathodoluminescence
Author(s): Kazuhito Nishimura; Jing Sheng Ma; Yoshihiro Yokota; Yusuke Mori; Hiroshi Kotsuka; Takashi Hirao; Makoto Kitabatake; Masahiro Deguchi; Kazuo Ogawa; Gang Ning; Hiroshi Tomimori; Akio Hiraki
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Paper Abstract

Nitrogen ions were implanted into diamond films formed by microwave plasma CVD. A color cathodoluminescence (CL) system were used to investigate the emission centers of as implanted and the subsequent annealed films. A zero-phono-line (ZPL) from the implanted N+ was observed at 3.19 eV. After annealing, a ZPL at 2.16 eV and a strong emission center in the violet region with a ZPL at 3.19 eV and phonon replicas were observed. The color CL images of the annealed films show that an orange-red color emission comes only from the {100} sectors because of the difference in crystal quality between the {100} and {111} sectors.

Paper Details

Date Published: 1 December 1991
PDF: 8 pages
Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); doi: 10.1117/12.48294
Show Author Affiliations
Kazuhito Nishimura, Osaka Diamond Industrial Co., Ltd. (Japan)
Jing Sheng Ma, Osaka Univ. (Japan)
Yoshihiro Yokota, Osaka Univ. (Japan)
Yusuke Mori, Osaka Univ. (Japan)
Hiroshi Kotsuka, Osaka Univ. (Japan)
Takashi Hirao, Matsushita Electric Industrial Co., Ltd. (Japan)
Makoto Kitabatake, Matsushita Electric Industrial Co., Ltd. (Japan)
Masahiro Deguchi, Matsushita Electric Industrial Co., Ltd. (Japan)
Kazuo Ogawa, Kyoto Univ. (Japan)
Gang Ning, Kyoto Univ. (Japan)
Hiroshi Tomimori, Osaka Diamond Industrial Co., Ltd. (Japan)
Akio Hiraki, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 1534:
Diamond Optics IV
Albert Feldman; Sandor Holly, Editor(s)

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