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Proceedings Paper

Study of titanium-carbon gradient layers grown by combination of laser deposition and magnetron sputtering
Author(s): Miroslav Jelinek; Jaromir Kadlec; Tomas Kocourek; Petr Bohac
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Paper Abstract

Gradient titanium- carbon films were grown by hybrid deposition arrangement combining laser deposition and DC magnetron sputtering. Laser was used for deposition of carbon films and magnetron simultaneously sputtered Ti on the same substrate. Depth profile of carbon and nitrogen species, films adhesion and microhardness are studied in connection with deposition conditions.

Paper Details

Date Published: 12 September 2002
PDF: 5 pages
Proc. SPIE 4915, Lasers in Material Processing and Manufacturing, (12 September 2002); doi: 10.1117/12.482904
Show Author Affiliations
Miroslav Jelinek, Institute of Physics (Czech Republic)
Jaromir Kadlec, Military Academy of Brno (Czech Republic)
Tomas Kocourek, Institute of Physics (Czech Republic)
Petr Bohac, Institute of Physics (Czech Republic)

Published in SPIE Proceedings Vol. 4915:
Lasers in Material Processing and Manufacturing
ShuShen Deng; Tatsuo Okada; Klaus Behler; XingZong Wang, Editor(s)

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