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Proceedings Paper

Three-dimensional microfabrication by laser-induced chemical deposition
Author(s): Libing Liu; Minghui Li; Yi Zhao; Chaoxiang Yang
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Paper Details

Date Published: 12 September 2002
PDF: 7 pages
Proc. SPIE 4915, Lasers in Material Processing and Manufacturing, (12 September 2002); doi: 10.1117/12.482899
Show Author Affiliations
Libing Liu, Shanghai Jiao Tong Univ. (China)
Minghui Li, Shanghai Jiao Tong Univ. (China)
Yi Zhao, Shanghai Jiao Tong Univ. (China)
Chaoxiang Yang, Shanghai Jiao Tong Univ. (China)

Published in SPIE Proceedings Vol. 4915:
Lasers in Material Processing and Manufacturing
ShuShen Deng; Tatsuo Okada; Klaus Behler; XingZong Wang, Editor(s)

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