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Proceedings Paper

Grating fabrication with CW CO2 laser irradiation
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Paper Abstract

In this paper, we will describe a new method to fabricate optical diffractive gratings on glass surface with direct CW CO2 laser irradiation. A laser beam with linear polarization was focused and scanned on a glass substrate. The interaction of the beam with the material irradiated results in a periodic ridge structure formation on the substrate under a well-controlled laser irradiation dose. Using multi-path scanning method, with a suitable overlap, diffractive grating with large area can be achieved. In this experiment, laser irradiation dose was 50 J/cm2, laser scanning speed was 0.2 mm/s, the diameter of focused beam was 30 μm, and the grating period was about 8 um.

Paper Details

Date Published: 12 September 2002
PDF: 6 pages
Proc. SPIE 4915, Lasers in Material Processing and Manufacturing, (12 September 2002); doi: 10.1117/12.482897
Show Author Affiliations
Dongjiang Wu, Data Storage Institute (Singapore)
Chengwu An, Data Storage Institute (Singapore)
Ming Hui Hong, Data Storage Institute (Singapore)
W. J. Wang, Data Storage Institute (Singapore)
Yingzi Peng, Data Storage Institute (Singapore)
Yongfeng Lu, Data Storage Institute (United States)


Published in SPIE Proceedings Vol. 4915:
Lasers in Material Processing and Manufacturing
ShuShen Deng; Tatsuo Okada; Klaus Behler; XingZong Wang, Editor(s)

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