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Proceedings Paper

Microvia formation with lasers
Author(s): Yunlong Sun; Corey M. Dunsky; Hisashi Matsumoto; Glenn Simenson
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Paper Details

Date Published: 12 September 2002
PDF: 12 pages
Proc. SPIE 4915, Lasers in Material Processing and Manufacturing, (12 September 2002); doi: 10.1117/12.482893
Show Author Affiliations
Yunlong Sun, Electro Scientific Industries, Inc. (United States)
Corey M. Dunsky, Electro Scientific Industries, Inc. (United States)
Hisashi Matsumoto, Electro Scientific Industries, Inc. (United States)
Glenn Simenson, Electro Scientific Industries, Inc. (United States)


Published in SPIE Proceedings Vol. 4915:
Lasers in Material Processing and Manufacturing
ShuShen Deng; Tatsuo Okada; Klaus Behler; XingZong Wang, Editor(s)

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