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Proceedings Paper

Laser micromachining in the microelectronics industry
Author(s): Yunlong Sun; Edward J. Swenson
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Paper Details

Date Published: 12 September 2002
PDF: 6 pages
Proc. SPIE 4915, Lasers in Material Processing and Manufacturing, (12 September 2002); doi: 10.1117/12.482886
Show Author Affiliations
Yunlong Sun, Electro Scientific Industries, Inc. (United States)
Edward J. Swenson, Electro Scientific Industries, Inc. (United States)


Published in SPIE Proceedings Vol. 4915:
Lasers in Material Processing and Manufacturing
ShuShen Deng; Tatsuo Okada; Klaus Behler; XingZong Wang, Editor(s)

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