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Proceedings Paper

Microprocessing by UV laser
Author(s): Qihong Lou; Tiejun Li
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Paper Details

Date Published: 12 September 2002
PDF: 12 pages
Proc. SPIE 4915, Lasers in Material Processing and Manufacturing, (12 September 2002); doi: 10.1117/12.482869
Show Author Affiliations
Qihong Lou, Shanghai Institute of Optics and Fine Mechanics (China)
Tiejun Li, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 4915:
Lasers in Material Processing and Manufacturing
ShuShen Deng; Tatsuo Okada; Klaus Behler; XingZong Wang, Editor(s)

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