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Proceedings Paper

Continuous TEM observation of diamond nucleus growth by side-view method
Author(s): Yasuyuki Gotoh; Kazuaki Kurihara; Yumiko Sawamoto; Toshisuke Kitakohji
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Paper Abstract

The growth of diamond particles using continuous transmission electron microscope (TEM) observation of a side-view of the sample was studied. Diamonds were synthesized using the DC plasma jet chemical vapor deposition (CVD). Synthesis was followed by TEM observation and this cycle was repeated. The shape of the diamond remained almost the same during growth and there were many small SiC particles on the Si surface. Analysis of this continuous observation suggested there was a thin (about 200 nm) gaseous layer containing CH4 radicals and SiH4 radicals. It appeared the SiC particles helped diamond particle growth on the Si substrate.

Paper Details

Date Published: 1 December 1991
PDF: 10 pages
Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); doi: 10.1117/12.48279
Show Author Affiliations
Yasuyuki Gotoh, Fujitsu Labs. Ltd. (Japan)
Kazuaki Kurihara, Fujitsu Labs. Ltd. (Japan)
Yumiko Sawamoto, Fujitsu Labs. Ltd. (Japan)
Toshisuke Kitakohji, Fujitsu Labs. Ltd. (Japan)


Published in SPIE Proceedings Vol. 1534:
Diamond Optics IV
Albert Feldman; Sandor Holly, Editor(s)

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