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Proceedings Paper

Diagnostics of a DC plasma torch
Author(s): Derrick A. Russell; Peter Taborek
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Paper Abstract

Optical emission spectroscopy, Langmuir probes, and calorimetric techniques have been used to characterize the plasma jet in a DC plasma torch diamond deposition apparatus. The experimental data are compared to calculations based on a thermodynamic equilibrium model. The ion temperature obtained from the atomic hydrogen emission is within 10% of the calorimetrically deduced gas temperature, while the electron temperature is approximately a factor of two higher. For a wide range of process conditions, the plasma temperature is almost independent of the torch input power, but depends strongly on the hydrogen concentration in the feed gas. Calorimetry provides a means of measuring the concentration of atomic hydrogen produced by the torch.

Paper Details

Date Published: 1 December 1991
PDF: 10 pages
Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); doi: 10.1117/12.48276
Show Author Affiliations
Derrick A. Russell, Univ. of California/Irvine (United States)
Peter Taborek, Univ. of California/Irvine (United States)

Published in SPIE Proceedings Vol. 1534:
Diamond Optics IV
Albert Feldman; Sandor Holly, Editor(s)

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