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Proceedings Paper

Pressure effects in the microwave plasma growth of polycrystalline diamond
Author(s): Alan B. Harker; Jeffrey F. DeNatale
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Paper Abstract

Microwave plasma deposition of polycrystalline diamond is investigated over the pressure range 1 to 100 kPa. The conditions of growth, microstructure, and spectroscopic properties of the resulting materials are compared. A phenomenological description of the dependence of diamond microstructure upon growth conditions is developed.

Paper Details

Date Published: 1 December 1991
PDF: 7 pages
Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); doi: 10.1117/12.48274
Show Author Affiliations
Alan B. Harker, Rockwell International Science Ctr. (United States)
Jeffrey F. DeNatale, Rockwell International Science Ctr. (United States)

Published in SPIE Proceedings Vol. 1534:
Diamond Optics IV
Albert Feldman; Sandor Holly, Editor(s)

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