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Proceedings Paper

Advanced processing of group-III nitrides
Author(s): Stephen J. Pearton; Fan Ren; B. P. Gila; Cammy R. Abernathy
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Paper Details

Date Published: 29 August 2002
PDF: 25 pages
Proc. SPIE 10303, Gallium-Nitride-based Technologies, (29 August 2002); doi: 10.1117/12.482624
Show Author Affiliations
Stephen J. Pearton, Univ. of Florida (United States)
Fan Ren, Univ. of Florida (United States)
B. P. Gila, Univ. of Florida (United States)
Cammy R. Abernathy, Univ. of Florida (United States)

Published in SPIE Proceedings Vol. 10303:
Gallium-Nitride-based Technologies
Marek Osinski, Editor(s)

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